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UDK: 532.53.05:532.5.011

2009. - V. 23. - N 10(103). - P. 33-37

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A novel technique of axial vibration control of the melt at Czochralski crystal growth by means of oscillating disk submerged under the crystal was developed. The novel AVC technique allows to generate vibrational flows with the directions, which are favorable for the growth of with low dislocation densities at high growing rates in the wide range of melt viscosity from 1 to 100 sPz.

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НОВЫЙ ВАРИАНТ МЕТОДА АКСИАЛЬНЫХ НИЗКОЧАСТОТНЫХ ВИБРАЦИЙ ПРИ ВЫРАЩИВАНИИ КРИСТАЛЛОВ ПО ЧОХРАЛЬСКОМУ

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